Yes, through the wafer, 525 microns deep

__________________________________________________________________

Sebastian Sosin


-----Original Message-----

From: 汪飞 [mailto:wangfeiustc@gmail.com]
Sent: Friday, November 14, 2008 1:58 PM
To: General MEMS discussion
Subject: Re: [mems-talk] etch stop layers fro silicon DRIE

Do you want etch through a wafer?