Hi everyone.  I currently have BCl3 and CF4 on my ICP/RIE
system.  Does anyone know of an effective BCl3 + CF4
selective plasma etch recipe for GaAs/AlGaAs?  I would
like to know gas ratio, chamber pressure, rf frequency,
etc. to recreate your results as best as possible.  I've
seen many journals online, but I can only find recipes for
BCl3 + SF6.  Thanks for your input in advance!