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rib waveguide using dry etch
2010-07-22
杜 彦召
2010-07-22
Pramod Gupta
2010-07-22
Bill Moffat
2010-07-26
杜 彦召
rib waveguide using dry etch
杜 彦召
2010-07-26
Hi Pramod Gupta:

I am etching silicon waveguide for optical communication.

Does anyone know how to inspect the rib waveguide sidewall roughness in mass
production?

Thanks
reply
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